At some point, though, China wants to go beyond 7nm. This is why China is working on its own EUV technology. China hasn’t developed a full-blown EUV scanner—it may never develop one. But work is underway in the arena. The EUV subsystems are being developed at several research institutes. For example, the Shanghai Institute of Optics and Fine Mechanics of the Chinese Academy of Sciences (CAS) last year described the development of EUV driven by a kilowatt laser. In 2020, researchers from the Institute of Microelectronics of the CAS published a paper on “EUV multilayer defect characterization via cycle-consistent learning.”
“There is a lot of research being done around different components of EUV,” VLSI Research’s Puhakka said. “I don’t think they have advanced to have a manufacturable EUV tool. Developing its own EUV will be a long process. I won’t say never, but it’s a long and hard road.”
Others agreed. “I assume that we see only part of what China is doing. It’s like an iceberg, most is hidden from view. Their academicians publish papers on EUV technology, but the work that I have seen has been mostly theoretical. I assume that there is some underlying hardware,” said Harry Levinson, principal at HJL Lithography.
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